Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings (2018)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6382/aaad7c

Publication URI: http://dx.doi.org/10.1088/1361-6382/aaad7c

Type: Journal Article/Review

Parent Publication: Classical and Quantum Gravity

Issue: 7