Effect of elevated substrate temperature deposition on the mechanical losses in tantala thin film coatings (2018)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6382/aaad7c
Publication URI: http://dx.doi.org/10.1088/1361-6382/aaad7c
Type: Journal Article/Review
Parent Publication: Classical and Quantum Gravity
Issue: 7