Plasma-Etched Pattern Transfer of Sub-10 nm Structures Using a Metal-Organic Resist and Helium Ion Beam Lithography. (2019)
Attributed to:
Manufacturing at the 7nm node and beyond enabled by novel resist technology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acs.nanolett.9b01911
PubMed Identifier: 31424217
Publication URI: http://europepmc.org/abstract/MED/31424217
Type: Journal Article/Review
Volume: 19
Parent Publication: Nano letters
Issue: 9
ISSN: 1530-6984