Photonic micro-structures produced by selective etching of laser-crystallized amorphous silicon (2019)

First Author: Martinez-Jimenez G
Attributed to:  Laser-Engineered Silicon: Manufacturing Low Cost Photonic Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ome.9.002573

Publication URI: http://dx.doi.org/10.1364/ome.9.002573

Type: Journal Article/Review

Parent Publication: Optical Materials Express

Issue: 6