HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform. (2019)

First Author: Petra R
Attributed to:  Laser-Engineered Silicon: Manufacturing Low Cost Photonic Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.27.015735

PubMed Identifier: 31163765

Publication URI: http://europepmc.org/abstract/MED/31163765

Type: Journal Article/Review

Volume: 27

Parent Publication: Optics express

Issue: 11

ISSN: 1094-4087