HWCVD a-Si:H interlayer slope waveguide coupler for multilayer silicon photonics platform. (2019)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/oe.27.015735
PubMed Identifier: 31163765
Publication URI: http://europepmc.org/abstract/MED/31163765
Type: Journal Article/Review
Volume: 27
Parent Publication: Optics express
Issue: 11
ISSN: 1094-4087