Residual flatness and scale calibration for a point autofocus surface topography measuring instrument (2019)

First Author: Maculotti G

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6501/ab188f

Publication URI: http://dx.doi.org/10.1088/1361-6501/ab188f

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 7