Optimizing reactive ion etching to remove sub-surface polishing damage on diamond (2019)
Attributed to:
Delta-doped diamond structures for high performance electronic devices
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.5094751
Publication URI: http://dx.doi.org/10.1063/1.5094751
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 24