ReaxFF molecular dynamics simulation study of nanoelectrode lithography oxidation process on silicon (100) surface (2019)

First Author: Hasan R
Attributed to:  Miniature Flexible & Reconfigurable Manufacturing System for 3D Micro-products funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.apsusc.2019.143679

Publication URI: http://dx.doi.org/10.1016/j.apsusc.2019.143679

Type: Journal Article/Review

Parent Publication: Applied Surface Science