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Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting (2019)

First Author: Tao K

Attributed to: Thin Film Acoustic Wave Platform for Conformable and Mechanically Flexible Biosensors funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.surfcoat.2018.11.102

Publication URI: http://dx.doi.org/10.1016/j.surfcoat.2018.11.102

Type: Journal Article/Review

Parent Publication: Surface and Coatings Technology