Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting (2019)
Attributed to:
Thin Film Acoustic Wave Platform for Conformable and Mechanically Flexible Biosensors
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.surfcoat.2018.11.102
Publication URI: http://dx.doi.org/10.1016/j.surfcoat.2018.11.102
Type: Journal Article/Review
Parent Publication: Surface and Coatings Technology