Imaging and Modeling the Optical Emission from CH Radicals in Microwave Activated C/H Plasmas. (2019)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acs.jpca.9b08345
PubMed Identifier: 31647649
Publication URI: http://europepmc.org/abstract/MED/31647649
Type: Journal Article/Review
Volume: 123
Parent Publication: The journal of physical chemistry. A
Issue: 46
ISSN: 1089-5639