Atomic layer deposition of functional multicomponent oxides (2019)
Attributed to:
Precision Manufacturing of Flexible CMOS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.5113656
Publication URI: http://dx.doi.org/10.1063/1.5113656
Type: Journal Article/Review
Parent Publication: APL Materials
Issue: 11