Thermal Degradation of Electroplated Nickel Thermal Microactuators (2009)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2009.2034394
Publication URI: http://dx.doi.org/10.1109/jmems.2009.2034394
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 6