Accurate and efficient height extraction in chromatic confocal microscopy using corrected fitting of the differential signal (2019)

First Author: Chen C

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.precisioneng.2019.02.001

Publication URI: http://dx.doi.org/10.1016/j.precisioneng.2019.02.001

Type: Journal Article/Review

Parent Publication: Precision Engineering