Rapid measurement of large step heights using a microscopic white-light spectral interferometer (2019)

First Author: Guo T

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2051-672x/ab2b20

Publication URI: http://dx.doi.org/10.1088/2051-672x/ab2b20

Type: Journal Article/Review

Parent Publication: Surface Topography: Metrology and Properties

Issue: 2