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Corrected differential fitting for height extraction in chromatic confocal microscopy (2019)

First Author: Chen C

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2511734

Publication URI: http://dx.doi.org/10.1117/12.2511734

Type: Conference/Paper/Proceeding/Abstract