Corrected differential fitting for height extraction in chromatic confocal microscopy (2019)
Attributed to:
Future Advanced Metrology Hub
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/12.2511734
Publication URI: http://dx.doi.org/10.1117/12.2511734
Type: Conference/Paper/Proceeding/Abstract