Germanium ion implantation for trimming the coupling efficiency of silicon racetrack resonators (2019)

First Author: Milosevic M
Attributed to:  Laser-Engineered Silicon: Manufacturing Low Cost Photonic Systems funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2508805

Publication URI: http://dx.doi.org/10.1117/12.2508805

Type: Conference/Paper/Proceeding/Abstract