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Thioether complexes of WSCl4, WOCl4 and WSCl3 and evaluation of thiochloride complexes as CVD precursors for WS2 thin films. (2020)

First Author: Smith DE
Attributed to:  Chemical vapour deposition of group 14 chalcogenides funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1039/d0dt00068j

PubMed Identifier: 32022094

Publication URI: http://europepmc.org/abstract/MED/32022094

Type: Journal Article/Review

Volume: 49

Parent Publication: Dalton transactions (Cambridge, England : 2003)

Issue: 8

ISSN: 1477-9226