Thioether complexes of WSCl4, WOCl4 and WSCl3 and evaluation of thiochloride complexes as CVD precursors for WS2 thin films. (2020)
Attributed to:
Chemical vapour deposition of group 14 chalcogenides
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1039/d0dt00068j
PubMed Identifier: 32022094
Publication URI: http://europepmc.org/abstract/MED/32022094
Type: Journal Article/Review
Volume: 49
Parent Publication: Dalton transactions (Cambridge, England : 2003)
Issue: 8
ISSN: 1477-9226