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Low temperature growth and optical properties of a-Ga2O3 deposited on sapphire by plasma enhanced atomic layer deposition (2019)

First Author: Roberts J

Attributed to: Sir Henry Royce Institute - Cambridge Equipment funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.jcrysgro.2019.125254

Publication URI: http://dx.doi.org/10.1016/j.jcrysgro.2019.125254

Type: Journal Article/Review

Parent Publication: Journal of Crystal Growth