The statistics of spoke configurations in high-power impulse magnetron sputtering discharges (2019)

First Author: Klein P

Attributed to: Cockcroft Institute funded by STFC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/aafab3

Publication URI: http://dx.doi.org/10.1088/1361-6463/aafab3

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 12