AlN overgrowth of nano-pillar-patterned sapphire with different offcut angle by metalorganic vapor phase epitaxy (2020)

First Author: Walde S
Attributed to:  Manufacturing of nano-engineered III-N semiconductors: Equipment Business Case funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.jcrysgro.2019.125343

Publication URI: http://dx.doi.org/10.1016/j.jcrysgro.2019.125343

Type: Journal Article/Review

Parent Publication: Journal of Crystal Growth