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Two-dimensional remote interferometric stage encoder through a single access port using range-resolved interferometry (2019)

First Author: Wiseman K

Attributed to: A new approach for highly accurate optical interferometry measurements in nanotechnology funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2525596

Publication URI: http://dx.doi.org/10.1117/12.2525596

Type: Conference/Paper/Proceeding/Abstract