Identification of colloidal silica polishing induced contamination in silicon (2019)
Attributed to:
Atom Probe Characterisation of Individual Dislocations in Multi-Crystalline Silicon
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.matchar.2019.04.029
Publication URI: http://dx.doi.org/10.1016/j.matchar.2019.04.029
Type: Journal Article/Review
Parent Publication: Materials Characterization