Dissociation of tetramethylsilane for the growth of SiC nanocrystals by atmospheric pressure microplasma (2020)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1002/ppap.201900243
Publication URI: http://dx.doi.org/10.1002/ppap.201900243
Type: Journal Article/Review
Parent Publication: Plasma Processes and Polymers
Issue: 5