Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments. (2020)

Abstract

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Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1039/d0ra02448a

PubMed Identifier: 35515426

Publication URI: http://europepmc.org/abstract/MED/35515426

Type: Journal Article/Review

Volume: 10

Parent Publication: RSC advances

Issue: 33

ISSN: 2046-2069