Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process (2020)
Attributed to:
HiPIMS-CVD Hybrid Process for Advanced Functional Coatings: Proof of concept
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/6.0000118
Publication URI: http://dx.doi.org/10.1116/6.0000118
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Issue: 3