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Nb-doped TiO2 coatings developed by high power impulse magnetron sputtering-chemical vapor deposition hybrid deposition process (2020)

First Author: Kulczyk-Malecka J

Attributed to: HiPIMS-CVD Hybrid Process for Advanced Functional Coatings: Proof of concept funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/6.0000118

Publication URI: http://dx.doi.org/10.1116/6.0000118

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Issue: 3