Plasma-enhanced pulsed laser deposition of copper oxide and zinc oxide thin films (2020)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/5.0008938
Publication URI: http://dx.doi.org/10.1063/5.0008938
Type: Journal Article/Review
Parent Publication: AIP Advances
Issue: 6