Flexible ZnO thin film acoustic wave device for gas flow rate measurement (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6439/ab9d2a

Publication URI: http://dx.doi.org/10.1088/1361-6439/ab9d2a

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 9