Noise Reduction in Coherence Scanning Interferometry for Surface Topography Measurement (2020)

First Author: Gomez C

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s41871-020-00057-4

Publication URI: http://dx.doi.org/10.1007/s41871-020-00057-4

Type: Journal Article/Review

Parent Publication: Nanomanufacturing and Metrology

Issue: 1