Metrological characteristics for the calibration of surface topography measuring instruments: a review (2020)

First Author: Leach R

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6501/abb54f

Publication URI: http://dx.doi.org/10.1088/1361-6501/abb54f

Type: Journal Article/Review

Parent Publication: Measurement Science and Technology

Issue: 3