Influence of surface materials on the volume production of negative ions in a radio-frequency driven hydrogen plasma (2020)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/abae93
Publication URI: http://dx.doi.org/10.1088/1361-6463/abae93
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 48