Three-dimensional interferometric stage encoder using a single access port (2021)

First Author: Wiseman K
Attributed to:  Engineering Photonics: Development and Application of Instrumentation and Sensors funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.optlaseng.2020.106342

Publication URI: http://dx.doi.org/10.1016/j.optlaseng.2020.106342

Type: Journal Article/Review

Parent Publication: Optics and Lasers in Engineering