Comparison of Conventional and Maskless Lithographic Techniques for More than Moore Post-Processing of Foundry CMOS Chips (2020)

First Author: Tsiamis A
Attributed to:  Implantable Microsystems for Personalised Anti-Cancer Therapy funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2020.3015964

Publication URI: http://dx.doi.org/10.1109/jmems.2020.3015964

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 5