Hot-wire CVD hydrogenated amorphous silicon for multi-layer photonic applications (2020)
Attributed to:
Silicon Photonics for Future Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/12.2546282
Publication URI: http://dx.doi.org/10.1117/12.2546282
Type: Conference/Paper/Proceeding/Abstract