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Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.35848/1347-4065/ab7313

Publication URI: http://dx.doi.org/10.35848/1347-4065/ab7313

Type: Journal Article/Review

Parent Publication: Japanese Journal of Applied Physics

Issue: SH