Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen (2020)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.35848/1347-4065/ab7313
Publication URI: http://dx.doi.org/10.35848/1347-4065/ab7313
Type: Journal Article/Review
Parent Publication: Japanese Journal of Applied Physics
Issue: SH