Gas temperature measurements in a pulsed, low-pressure inductively coupled plasma in oxygen (2020)
Attributed to:
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.35848/1347-4065/ab7313
Publication URI: http://dx.doi.org/10.35848/1347-4065/ab7313
Type: Journal Article/Review
Parent Publication: Japanese Journal of Applied Physics
Issue: SH