Integration of a scanning interferometer into a robotic inspection system for factory deployment (2020)

First Author: Biro I

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/sii46433.2020.9025972

Publication URI: http://dx.doi.org/10.1109/sii46433.2020.9025972

Type: Conference/Paper/Proceeding/Abstract