P-51: Investigation on ICP-CVD as a Polyvalent Low Cost Technology Dedicated to Low Temperature µ-Si TFT Prototyping. (2020)

First Author: De Sagazan O

Attributed to: Nanoelectronic circuits and devices funded by NERC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/sdtp.14182

Publication URI: http://dx.doi.org/10.1002/sdtp.14182

Type: Journal Article/Review

Parent Publication: SID Symposium Digest of Technical Papers

Issue: 1

ISSN: 0097-966X