Spatial Sensitivity of Silicon GAA Nanowire FETs Under Line Edge Roughness Variations (2018)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jeds.2018.2828504
Publication URI: http://dx.doi.org/10.1109/jeds.2018.2828504
Type: Journal Article/Review
Parent Publication: IEEE Journal of the Electron Devices Society