Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor (2021)
Attributed to:
Real-time In-line Microstructural Engineering (RIME)
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/tim.2020.3027929
Publication URI: http://dx.doi.org/10.1109/tim.2020.3027929
Type: Journal Article/Review
Parent Publication: IEEE Transactions on Instrumentation and Measurement