Thickness Measurement of Metallic Film Based on a High-Frequency Feature of Triple-Coil Electromagnetic Eddy Current Sensor (2021)

First Author: Lu M
Attributed to:  Real-time In-line Microstructural Engineering (RIME) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/tim.2020.3027929

Publication URI: http://dx.doi.org/10.1109/tim.2020.3027929

Type: Journal Article/Review

Parent Publication: IEEE Transactions on Instrumentation and Measurement