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Stress-Assisted Thermal Diffusion Barrier Breakdown in Ion Beam Deposited Cu/W Nano-Multilayers on Si Substrate Observed by in Situ GISAXS and Transmission EDX. (2021)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1021/acsami.0c19173

PubMed Identifier: 33507755

Publication URI: http://europepmc.org/abstract/MED/33507755

Type: Journal Article/Review

Volume: 13

Parent Publication: ACS applied materials & interfaces

Issue: 5

ISSN: 1944-8244