A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment (2021)
Attributed to:
Robotics and Artificial Intelligence for Nuclear (RAIN)
funded by
ISCF
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.ymssp.2020.107603
Publication URI: http://dx.doi.org/10.1016/j.ymssp.2020.107603
Type: Journal Article/Review
Parent Publication: Mechanical Systems and Signal Processing