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Accuracy improvement of a white-light spectral interferometer using a line-by-line spectral calibration method (2020)

First Author: Guo T

Attributed to: Future Advanced Metrology Hub funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2051-672x/ab9682

Publication URI: http://dx.doi.org/10.1088/2051-672x/ab9682

Type: Journal Article/Review

Parent Publication: Surface Topography: Metrology and Properties

Issue: 2