Accuracy improvement of a white-light spectral interferometer using a line-by-line spectral calibration method (2020)
Attributed to:
Future Advanced Metrology Hub
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/2051-672x/ab9682
Publication URI: http://dx.doi.org/10.1088/2051-672x/ab9682
Type: Journal Article/Review
Parent Publication: Surface Topography: Metrology and Properties
Issue: 2