Acoustofluidics Along Inclined Surfaces Based on AlN/Si Surface Acoustic Wave Devices (2020)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056176
Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056176
Type: Conference/Paper/Proceeding/Abstract