Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves (2020)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056328
Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056328
Type: Conference/Paper/Proceeding/Abstract