Rapid and Controllable Digital Microfluidic Heating Using AlN/Si Rayleigh Surface Acoustic Waves (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056328

Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056328

Type: Conference/Paper/Proceeding/Abstract