High level active n + doping of strained germanium through co-implantation and nanosecond pulsed laser melting (2018)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.5012512
Publication URI: http://dx.doi.org/10.1063/1.5012512
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 16