Improved retention of phosphorus donors in germanium using a non-amorphizing fluorine co-implantation technique (2018)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.4999210
Publication URI: http://dx.doi.org/10.1063/1.4999210
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 16